The semiconductor industry demands precision, cleanliness, and reliability. Every process—from wafer fabrication to final testing—relies on advanced materials that can withstand aggressive chemistries, high temperatures, and static-sensitive environments.
High-performance thermoplastics like PEEK, ESD-safe PEEK, PVDF, Ultem® (PEI), PAI, and PPS have become critical to semiconductor manufacturing, offering the mechanical strength, chemical resistance, and cleanliness required for next-gen chip production. Explore our full line of high-performance thermoplastics available for semiconductor applications.
Precision Components for Every Stage
Semiconductor production involves a wide range of applications where engineered plastics offer distinct advantages over metals and lower-grade polymers:
Wafer Handling & Processing
Handling fragile wafers safely and cleanly is paramount. Common components include:
- Wafer holders
- Wafer clamp rings
- Wafer lapping rings
- CMP retaining rings
These are often manufactured from PEEK, PAI, or PPS due to their wear resistance, high purity, and dimensional stability. CMP rings in particular must maintain integrity during abrasive polishing processes, making material choice mission-critical.
Wet and Dry Process Equipment
Corrosive etchants and cleaning chemistries demand chemical-resistant materials. PVDF and PPS are ideal for:
- Batch spray chambers
- Wafer handling wands
- Plasma etching shields
These components maintain their integrity even under continuous chemical exposure and elevated temperatures.
Testing & Inspection
As chips become more complex, inspection and testing require ultra-stable, precise fixtures. Key parts include:
- IC test sockets
- Inspection fixtures
Materials like ESD PEEK, Ultem®, and PAI are commonly used due to their excellent dimensional stability, electrical properties, and resistance to thermal cycling—helping to maintain accuracy and repeatability in sensitive environments.
Why These Materials?
- PEEK: High mechanical strength, heat resistance, and purity; ideal for CMP and wafer handling.
- ESD PEEK: Static-dissipative variant for electro-sensitive environments.
- PVDF: Excellent chemical resistance for acid/base environments.
- Ultem® (PEI): High strength and thermal performance with inherent flame resistance. Learn more from SABIC.
- PAI: Extremely dimensionally stable, even at high temperatures—ideal for precision parts.
- PPS: High chemical resistance and cost-effective performance in wet process tools.
Precision Plastics for a High-Tech World
From CMP rings to plasma etch shields and IC test sockets, today’s semiconductor equipment depends on precision-engineered plastic materials that deliver consistent performance in harsh conditions.
Modern Plastics supports the semiconductor industry with high-purity materials and application-specific guidance to ensure reliability and compliance throughout your production process.
Stay current with evolving semiconductor trends at SEMI.org, or contact us to speak with a materials expert about your specific application needs.
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